Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
Masheyeva R.U. Dzhumagulova K.N. Myrzaly M. Schulze J. Donkó Z.
1 July 2021American Institute of Physics Inc.
AIP Advances
2021#11Issue 7
In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function of the electrode surface characteristics. For the latter, we consider and vary the coefficients that characterize the elastic reflection of electrons from the surfaces and the ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations of the plasma and on a model that aids the understanding of the computational results. Electron reflection from the electrodes is found to slightly affect the discharge asymmetry in the presence of multi-frequency excitation, whereas secondary electrons cause distinct changes to the asymmetry of the plasma as a function of the phase angle between the harmonics of the driving voltage waveform and as a function the number of these harmonics.
Text of the article Перейти на текст статьи
IETP, Al-Farabi Kazakh National University, 71 Al-Farabi Ave., Almaty, 050040, Kazakhstan
Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Bochum, D-44780, Germany
Wigner Research Centre for Physics, Budapest, H1121, Hungary
IETP
Department of Electrical Engineering and Information Science
Wigner Research Centre for Physics
10 лет помогаем публиковать статьи Международный издатель
Книга Публикация научной статьи Волощук 2026 Book Publication of a scientific article 2026