Experimental and numerical study of the ionization-attachment instability in an O2 capacitively coupled radio frequency plasma
Masheyeva R. Vass M. Myrzaly M. Tian C.-B. Dzhumagulova K. Schulze J. Donkó Z. Hartmann P.
1 April 2025Institute of Physics
Plasma Sources Science and Technology
2025#34Issue 4
This study examines the emergence of an ionization-attachment plasma instability in a geometrically symmetric capacitively coupled plasma reactor with stainless steel electrodes operated in oxygen. Periodic fluctuations in optical emission intensity were observed under varying conditions of pressure and voltage. To interpret the experimental data, a kinetic (PIC/MCC) simulation approach was employed, with a particular focus on the influence of external parameters, including the voltage amplitude and the O 2 + ion induced secondary electron emission coefficient (SEEC, γ). By varying the γ coefficient at fixed pressure and voltage amplitude, the aim was to achieve the best possible agreement between the measured and computed oscillation frequencies. The experimentally observed oscillation frequency of f in = 0.25 kHz at φ0 = 655 V voltage amplitude (with 13.56 MHz RF excitation) was reproduced in the simulation with γ = 0.0042 at φ0 = 600 V. The results highlight the critical role of these parameters in the onset and characteristics of plasma instability and correspond to a computationally assisted diagnostic to determine ion induced secondary electron emission coefficients.
capacitively coupled plasma , instability , particle in cell simulation
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Institute for Solid State Physics and Optics, HUN-REN Wigner Research Centre for Physics, Budapest, 1121, Hungary
Research Institute of Experimental and Theoretical Physics, Al-Farabi Kazakh National University, Almaty, 050040, Kazakhstan
Satbayev University, Almaty, 050000, Kazakhstan
Chair of Applied Electrodynamics and Plasma Technology, Faculty of Electrical Engineering and Information Sciences, Ruhr University Bochum, Bochum, 44801, Germany
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams, Ministry of Education, School of Physics, Dalian University of Technology, Dalian, 116024, China
Institute for Solid State Physics and Optics
Research Institute of Experimental and Theoretical Physics
Satbayev University
Chair of Applied Electrodynamics and Plasma Technology
Key Laboratory of Materials Modification by Laser
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