Electron power absorption in CF4 capacitively coupled RF plasmas operated in the striation mode
Masheyeva R. Vass M. Wang X.-K. Liu Y.-X. Derzsi A. Hartmann P. Schulze J. Donkó Z.
April 2024Institute of Physics
Plasma Sources Science and Technology
2024#33Issue 4
The electron power absorption mechanisms in electronegative capacitively coupled plasmas in CF4 are investigated using particle-in-cell/Monte Carlo collisions simulations at a pressure of p = 60 Pa, a driving frequency of f = 13.56 MHz for voltage amplitudes in the interval of ϕ 0 = 100 − 300 V, where pronounced self-organized density variations, i.e. striations, develop. The calculations are based on the Boltzmann term analysis, a computational diagnostic method capable of providing a complete spatio-temporal description of electron power absorption. The discharge undergoes an electron power absorption mode transition from the drift-ambipolar- to the striation-mode at φ 0 = 180 V. Although Ohmic power absorption is found to be the dominant electron power absorption mechanism in the parameter range considered, the electron power absorption mode transition can be inferred from the behaviour of the spatio-temporally averaged ambipolar power absorption as a function of the voltage amplitude. Furthermore, it is shown, that as a consequence of the presence of striations, the temporal modulation of the electron density leads to a temporal modulation of the ambipolar electric field, which is responsible for the striated structures of various physical quantities related to electrons, such as the electron temperature and the ionization source function.
Boltzmann term analysis , capacitively coupled plasma , electron power absorption , particle in cell simulation
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Institute for Solid State Physics and Optics, HUN-REN Wigner Research Centre for Physics, Budapest, 1121, Hungary
Department of General Physics, Satbayev University, Almaty, 050013, Kazakhstan
Chair of Applied Electrodynamics and Plasma Technology, Faculty of Electrical Engineering and Information Sciences, Ruhr University Bochum, Bochum, 44801, Germany
Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian, 116024, China
Institute for Solid State Physics and Optics
Department of General Physics
Chair of Applied Electrodynamics and Plasma Technology
Key Laboratory of Materials Modification by Laser
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