Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings
Mamaeva A. Kenzhegulov A. Panichkin A. Alibekov Z. Wieleba W.
February 2022MDPI
Coatings
2022#12Issue 2
In the present work, the titanium carbonitride coatings were deposited by the reactive magnetron sputtering method at different substrate bias: 0, −70 V, and −100 V. The effect of the substrate bias on the structure, composition, and mechanical and tribological properties of titanium carbonitride coatings was studied. Scanning electron microscopy, nanoindentation, sliding wear test (ball-on-disk method), X-ray phase, and elemental analysis methods were used to evaluate the tribological properties and microstructure of the thin coatings. The dependencies obtained resulted in the determination of the most preferred mode of deposition by magnetron sputtering at a negative substrate bias in an atmosphere of argon–acetylene–nitrogen.
Coating , Friction coefficient , Magnetron sputtering , Nanohardness , Substrate , Substrate bias , Titanium carbonitride , Wear rate , Wear resistance
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The Institute of Metallurgy and Ore Beneficiation, Satbayev University, Almaty, 050013, Kazakhstan
Faculty of Mechanical Engineering, Wroclaw University of Science and Technology, Wroclaw, 50-370, Poland
The Institute of Metallurgy and Ore Beneficiation
Faculty of Mechanical Engineering
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