Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
Derzsi A. Vass M. Masheyeva R. Horváth B. Donkó Z. Hartmann P.
February 2024Institute of Physics
Plasma Sources Science and Technology
2024#33Issue 2
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions simulations are performed to investigate the excitation dynamics in low-pressure capacitively coupled plasmas (CCPs) in argon-oxygen mixtures. The system used for this study is a geometrically symmetric CCP reactor operated in a 70% Ar-30% O2 mixture at 120 Pa, applying a peak-to-peak voltage of 350 V, with a wide range of driving RF frequencies (2 MHz ⩽ f ⩽ 15 MHz). The measured and calculated spatio-temporal distributions of the electron impact excitation rates from the Ar ground state to the Ar 2 p 1 level show good qualitative agreement. The distributions show significant frequency dependence, which is generally considered to be predictive of transitions in the dominant discharge operating mode. Three frequency ranges can be distinguished, showing distinctly different excitation characteristics: (i) in the low frequency range ( f ⩽ 3 MHz), excitation is strong at the sheaths and weak in the bulk region; (ii) at intermediate frequencies (3.5 MHz ⩽ f ⩽ 5 MHz), the excitation rate in the bulk region is enhanced and shows striation formation; (iii) above 6 MHz, excitation in the bulk gradually decreases with increasing frequency. Boltzmann term analysis was performed to quantify the frequency-dependent contributions of the Ohmic and ambipolar terms to the electron power absorption.
argon-oxygen plasma , capacitively coupled plasma , electron power absorption , PIC/MCC simulation , PROES measurement
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Institute for Solid State Physics and Optics, HUN-REN Wigner Research Centre for Physics, Budapest, 1121, Hungary
Department of Electrical Engineering and Information Science, Ruhr University Bochum, Bochum, 44780, Germany
Al-Farabi Kazakh National University, Institute of Experimental and Theoretical Physics, Almaty, 050040, Kazakhstan
Institute for Solid State Physics and Optics
Department of Electrical Engineering and Information Science
Al-Farabi Kazakh National University
10 лет помогаем публиковать статьи Международный издатель
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