The study of the synthesis of carbon nanomaterials by the plasma-enhanced chemical vapour deposition method
Yerlanuly Ye. Batryshev D.G. Gabdullin M.T. Ramazanov T.S. Ibrashev K.N. Kang W.
2021Inderscience Publishers
International Journal of Nanotechnology
2021#18Issue 9-10779 - 787 pp.
In this work, the results of a study of the synthesis of carbon nanomaterials by plasma-enhanced chemical vapour deposition at various plasma parameters, including at low discharge powers, are presented. Different types of carbon nanomaterials were synthesised in the plasma of radio-frequency (RF) discharge. The dependence of the obtained type of carbon nanostructure on the synthesis parameters (medium temperature and RF discharge power) was experimentally shown. The Raman spectroscopy analysis of obtained samples showed that the more defective structure among obtained samples is observed for carbon nanowalls. One of the possible reasons for this is the vertical orientation of graphene sheets and the appearance of edge effects. Based on the analysis of the obtained results of scanning electron microscope (SEM) images and the Raman spectrum, a process map for the synthesis of carbon nanomaterials was developed as an RF discharge power function of temperature, where various zones, in particular, carbon nanoparticles, carbon nanofibres, carbon nanowires, and multilayer graphene zones, were marked. Copyright
Carbon nanomaterials , Plasma-enhanced chemical vapour deposition , Radio-frequency discharge , Raman spectrum , Scanning electron microscope , SEM
Text of the article Перейти на текст статьи
Laboratory of Engineering Profile, Al-Farabi KazNU, Al-Farabi Ave. 71, Almaty, 050040, Kazakhstan
Nanotechnology Laboratory, JSC “KBTU”, Tole bi St. 59, Almaty, 050000, Kazakhstan
Institute of Applied Sciences and Information Technology, Almaty, 050038, Kazakhstan
Kh. Dosmukhamedov Atyrau State University, Studenchesky St. 212/1, Atyrau, 060011, Kazakhstan
Kazakh-British Technical University, Tole bi St. 59, Almaty, 050000, Kazakhstan
Research Institute of Experimental and Theoretical Physics, Al-Farabi KazNU, Al-Farabi Ave. 71, Almaty, 050040, Kazakhstan
School of Petroleum Engineering, China University of Petroleum (East China), Qingdao, 266580, China
Laboratory of Engineering Profile
Nanotechnology Laboratory
Institute of Applied Sciences and Information Technology
Kh. Dosmukhamedov Atyrau State University
Kazakh-British Technical University
Research Institute of Experimental and Theoretical Physics
School of Petroleum Engineering
10 лет помогаем публиковать статьи Международный издатель
Книга Публикация научной статьи Волощук 2026 Book Publication of a scientific article 2026