Direct Fabrication of Sub-10 nm Nanopores in WO3Nanosheets Using Single Swift Heavy Ions
Xu L. Rymzhanov R.A. Zhai P. Zhang S. Hu P. Meng X. Zeng J. Sun Y. Liu J.
24 May 2023American Chemical Society
Nano Letters
2023#23Issue 104502 - 4509 pp.
Extending the fabrication methodology of solid-state nanopores in a wide range of materials is significant in the fields of single molecule detection, nanofluidic devices, and nanofiltration membranes. Here, we demonstrate a new method to directly fabricate size- and density-controllable sub-10 nm nanopores in WO3nanosheets using single swift heavy ions (SHIs) without any chemical etching process. By selecting ions of different electronic energy losses (Se), nanopores with sizes from 1.8 to 7.4 nm can be created in WO3nanosheets. The creation efficiency of nanopores achieves ∼100% for Se> 20 keV/nm, and there exists a critical thickness below which nanopores can be created. Combined with molecular dynamics simulations, we propose that the viscosity and surface tension of the transient molten phase caused by SHIs are the key factors for the formation of nanopores. This method paves a way to fabricate solid-state nanopores in materials with a low viscosity and surface tension.
Molecular dynamics simulation , Nanopores , Swift heavy ions , TEM , WO3
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Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, 730000, China
Joint Institute for Nuclear Research, Joliot-Curie 6, Dubna, 141980, Russian Federation
The Institute of Nuclear Physics, Ibragimov St. 1, Almaty, 050032, Kazakhstan
School of Nuclear Science and Technology, University of Chinese Academy of Sciences, Beijing, 100049, China
Electron Microscopy Centre of Lanzhou University, Lanzhou University, Lanzhou, 730000, China
Institute of Modern Physics
Joint Institute for Nuclear Research
The Institute of Nuclear Physics
School of Nuclear Science and Technology
Electron Microscopy Centre of Lanzhou University
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