Physical Vapor Deposition of Cathode Materials for All Solid-State Li Ion Batteries: A Review
Uzakbaiuly B. Mukanova A. Zhang Y. Bakenov Z.
28 May 2021Frontiers Media S.A.
Frontiers in Energy Research
2021#9
With the development of smart electronics, a wide range of techniques have been considered for efficient co-integration of micro devices and micro energy sources. Physical vapor deposition (PVD) by means of thermal evaporation, magnetron sputtering, ion-beam deposition, pulsed laser deposition, etc., is among the most promising techniques for such purposes. Layer-by-layer deposition of all solid-state thin-film batteries via PVD has led to many publications in the last two decades. In these batteries, active materials are homogeneous and usually binder free, which makes them more promising in terms of energy density than those prepared by the traditional powder slurry technique. This review provides a summary of the preparation of cathode materials by PVD for all solid-state thin-film batteries. Cathodes based on intercalation and conversion reaction, as well as properties of thin-film electrode–electrolyte interface, are discussed. © Copyright
cathode , Li ion batteries , physical vapor deposition , thermal evaporation , thin-film batteries
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National Laboratory Astana, Nazarbayev University, Nur-Sultan, Kazakhstan
Department of Chemical and Materials Engineering, Nazarbayev University, Nur-Sultan, Kazakhstan
Research Institute for Energy Equipment Materials, Hebei University of Technology, Tianjin, China
Institute of Batteries LLC, Nur-Sultan, Kazakhstan
National Laboratory Astana
Department of Chemical and Materials Engineering
Research Institute for Energy Equipment Materials
Institute of Batteries LLC
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