Analysis of dynamic pull-in voltage and response time for a micro-electro-mechanical oscillator made of power-law materials


Skrzypacz P. Wei D. Nurakhmetov D. Kostsov E.G. Sokolov A.A. Begzhigitov M. Ellis G.
July 2021Springer Science and Business Media B.V.

Nonlinear Dynamics
2021#105Issue 1227 - 240 pp.

Analysis of dynamic pull-in voltage for a micro-electro-mechanical oscillator of platform type is performed. The lumped mass model for the actuated micro-cantilever beam made of power-law material is established and the bifurcation is investigated with respect to the dimensionless voltage parameter using simple phase plane analysis. The necessary and sufficient conditions for the existence of periodic solutions to the lumped mass model equation are derived and proved analytically. The pull-in conditions on the strength coefficient, power-law exponent, and voltage are determined. Moreover, the response time is analyzed and approximate periodic solutions are derived. The established analytical results are illustrated numerically.

Cantilever power-law beam , MEMS , Nonlinear oscillator , Periodic solution , Pull-in , Singularity

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School of Sciences and Humanities, Nazarbayev University, 53 Kabanbay Batyr Ave., Nur-Sultan, 010000, Kazakhstan
Institute of Automation and Electrometry, Siberian Branch of Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090, Russian Federation
King’s College, Strand, London, WC2R 2LS, United Kingdom
School of Engineering and Digital Sciences, Nazarbayev University, 53 Kabanbay Batyr Ave., Nur-Sultan, 010000, Kazakhstan

School of Sciences and Humanities
Institute of Automation and Electrometry
King’s College
School of Engineering and Digital Sciences

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