Study of the influence of palladium nanoparticles on the structure of DLC films synthesized on silicon (100) substrates
Ryaguzov A.P. Assembayeva A.R. Myrzabekova M.M. Nemkayeva R.R. Guseinov N.R.
June 2022Elsevier Ltd
Diamond and Related Materials
2022#126
This work reports about the study of the structure of films of amorphous diamond-like carbon modified with palladium nanoparticles and synthesized on silicon (100) substrates (a-C x>). Results of Raman studies indicate the change in the ratio of sp2/sp3 sites depending on the Pd concentration in the carbon films. It was found that palladium nanoparticles affect the formation of carbon bonds and increase the number of sp2 sites, and at concentrations of more than 1 at.%, the film structure becomes graphite-like. In addition, atomic force microscopy methods revealed the effect of palladium on the surface morphology of a-C x> films and non-uniform distribution of electron density. The size of the particles which form the structure of the a-C x> films was estimated by using the “threshold method of grains analysis” program.
Atomic force microscopy , Diamond-like carbon films , Magnetron ion-plasma sputtering , Palladium nanoparticles , Raman spectroscopy
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NNLOT Al-Farabi Kazakh National University, Almaty, Kazakhstan
Satbayev University, Almaty, Kazakhstan
KAZALFATECH LTD Research Center, Kazakhstan
NNLOT Al-Farabi Kazakh National University
Satbayev University
KAZALFATECH LTD Research Center
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