Thermal Stability of the Structure and Optical Properties of Nanostructured TIO2 Films
Mikhailova S.L. Prikhodko O.Y. Mukhametkarimov Y.S. Dautkhan K. Doseke U.A. Kozyukhin S.A. Kozik V.V. Ismailova G.A. Maksimova S.Y. Tarapeyeva A.Y. Zhakypov A.S.
April 2021Springer
Russian Physics Journal
2021#63Issue 122045 - 2051 pp.
The structure and optical properties of titanium dioxide films have been studied during annealing from 100 to 400°C. The films were obtained by ion-plasma high-frequency magnetron sputtering of polycrystalline rutile target in an argon atmosphere. It was shown that as-prepared TiO2 films are nanostructured with ~8 nm rutile crystallites and ~3.3 Å interplanar distances and contain a small fraction of anatase. The optical band gap of the films is 3.01 eV, and the refractive index under normal conditions is 2.25. The film annealing at tamperatures from 100 to 400°C does not practically change their structure, optical band gap, and refractive index under normal conditions, i.e., the obtained nanostructured TiO2 films are thermally stable.
annealing , ion-plasma sputtering , optical band gap , refractive index , structure , titanium dioxide films
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Al-Farabi Kazakh National University, Almaty, Kazakhstan
Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences, Moscow, Russian Federation
National Research Tomsk State University, Tomsk, Russian Federation
Al-Farabi Kazakh National University
Kurnakov Institute of General and Inorganic Chemistry of the Russian Academy of Sciences
National Research Tomsk State University
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