Microstructure and tribomechanical properties of multilayer TiZrN/TiSiN composite coatings with nanoscale architecture by cathodic-arc evaporation

Maksakova O.V. Zhanyssov S. Plotnikov S.V. Konarski P. Budzynski P. Pogrebnjak A.D. Beresnev V.M. Mazilin B.O. Makhmudov N.A. Kupchishin A.I. Kravchenko Y.O.
March 2021 Springer

Journal of Materials Science
2021 #56 Issue 8 5067 - 5081 pp.

Multilayer TiZrN/TiSiN coatings were deposited on steel substrate by the cathodic-arc evaporation technique. The TiZr (75:25 at. %) and TiSi (95:5 at. %) alloy cathodes served as evaporation sources. Scanning electron microscopy with energy-dispersive spectroscopy, secondary ion mass-spectrometry, X-ray diffraction and X-ray photoelectron spectroscopy were employed to investigate the microstructure, elemental composition, phase state and bonding structure of the deposited coatings. Nanoindentation and ball-on-disk tribology tests were used to measure the mechanical and tribological features of the coatings, such as hardness, elastic modulus, toughness, friction coefficient and wear rate. The results show that all multilayers were fcc structures with a strong preferred orientation along (111) plane. The coherent growth of the multilayers contributed to the formation of the fine-grained structure with crystallites of 9.2–11.6 nm size and a low level of residual stresses of− (3.5–5.3) GPa. All multilayer coatings exhibited high hardness up to 38.2 ± 1.15 GPa and elastic modulus up to 430 ± 12.9 GPa, indicating higher resistance against plastic deformation compared to TiZrN and TiSiN films. The result of ball-on-disk wear tests showed that the multilayer sample with the best structural features (modulation period of 20.4 nm, 0.86 at. % of Si, the crystallite size of 9.2 nm and residual stress of− 3.5 GPa) demonstrated the lowest friction coefficient of 0.844 and better wear rate of 3.32·10^–5 mm³/N m.

Text of the article Перейти на текст статьи

Department of Nanoelectronics, Sumy State University, 2, Rymskogo-Korsakova st, Sumy, 40007, Ukraine
D. Serikbayev East Kazakhstan State Technical University, 69, Protozanov st., Ust-Kamenogorsk, 070004, Kazakhstan
Łukasiewicz Research Network–Tele and Radio Research Institute, 11, Ratuszowa st., Warsaw, 03-450, Poland
Lublin University of Technology, 38 D, Nadbystrzycka st., Lublin, 20-618, Poland
V.N. Karazin Kharkiv National University, 4, Svobody sq., Kharkiv, 61022, Ukraine
Academy of Armed Force of the Republic of Uzbekistan, 2, Parkent st., Tashkent, 100075, Uzbekistan
Abai Kazakh National Pedagogical University, 13, Dostyk ave., Almaty, 050010, Kazakhstan

Department of Nanoelectronics
D. Serikbayev East Kazakhstan State Technical University
Łukasiewicz Research Network–Tele and Radio Research Institute
Lublin University of Technology
V.N. Karazin Kharkiv National University
Academy of Armed Force of the Republic of Uzbekistan
Abai Kazakh National Pedagogical University

10 лет помогаем публиковать статьи Международный издатель

Книга Публикация научной статьи Волощук 2026 Book Publication of a scientific article 2026