Broad infrared absorption band through ion beam hyperdoping of silicon with selenium
Komarov F. Parkhomenko I. Alzhanova A. Wang T. Zhussupbekov K. Zhussupbekova A. Shvets I. Wendler E. Berman S. Milchanin O.
1 December 2023Elsevier B.V.
Applied Surface Science
2023#639
In this work, we present the formation of silicon layers hyperdoped with selenium through Se implantation followed by pulsed laser annealing. The concentration depth distribution of Se atoms was investigated by Rutherford backscattering and X-Ray photoelectron spectroscopies. Scanning tunneling spectroscopy confirmed the formation of intermediate sub-band within Si band gap. The crystallinity of the doped silicon layer and the fraction of Se atoms in Si lattice sites were determined using backscattering yield analysis. Experimental and theoretical sub-band properties were compared and discussed. Notably, a significant increase in light absorption across a wide spectral region (0.2–23.0 μm) was observed, demonstrating the potential of selenium hyperdoping for enhancing infrared absorption in silicon.
Absorption , Hyperdoping , Impurity sub-band , Laser annealing , Selenium implantation , Silicon
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A.N. Sevchenko Institute of Applied Physical Problems of Belarusian State University, Kurchatov Str. 7, Minsk, 220045, Belarus
Belarusian State University, Kurchatov Str. 5, Minsk, 220045, Belarus
L.N. Gumilyov Eurasian National University, Satpayev 2, Astana, 010008, Kazakhstan
School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin 2, D02 PN40 Dublin, Ireland
School of Chemistry, Trinity College Dublin, Dublin 2, D02 PN40 Dublin, Ireland
Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, D-07743 Jena, Germany
A.N. Sevchenko Institute of Applied Physical Problems of Belarusian State University
Belarusian State University
L.N. Gumilyov Eurasian National University
School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN)
School of Chemistry
Friedrich-Schiller-Universität Jena
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