Development of Cupric Oxide/Porous Silicon (CuO/PS) Heterostructure Enabled Room Temperature Methane Sensor for Enhanced Industrial Safety
Khaniyev B. Ibraimov M. Nalibayev Y. Skabylov A. Khaniyeva A. Liu J. Tezekbay Y. Duisebayev T. Tileu A. Meirambekuly N.
October 2024Engineered Science Publisher
Engineered Science
2024#31
We report the development and characterization of a methane gas sensor made from copper oxide/porous silicon (CuO/PS) heterostructure. The sensor integrates the CuO layer on the PS surface, obtained by the DC magnetron sputtering technology, which increases the sensor’s surface area and facilitates gas molecule interaction. We present an analysis of the sensor’s morphological and structural characteristics, including detailed scanning electron microscopy (SEM) and X-ray diffraction (XRD) studies, and revealed the effective formation and interface of the heterostructure. The sensor demonstrates performance with good sensitivity to methane, characterized by a dynamic response. Sensitivity tests show a significant enhancement in signal response, and dynamic response evaluations indicate the repeatability of the sensor. The results suggest that the CuO/PS sensor offers a promising solution for methane detection, with potential applications in environmental monitoring, industrial safety, and process control.
Copper oxide , DC magnetron sputtering , Methane gas sensor , Monitoring system , Porous silicon , Semiconductor heterostructure
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Department of Physics and Technology, Al-Farabi Kazakh National University, Al-Farabi av. 71, Almaty, 050040, Kazakhstan
State Key Laboratory of Solidification Processing, Center of Advanced Lubrication and Seal Materials, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi’an, 710072, China
Department of Physics and Technology
State Key Laboratory of Solidification Processing
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