Examining the Desirable Properties of ZnSnOy by Annealing Treatment with a Real-Time Observation of Resistivity
Kaisha A. Caffrey D. Ainabayev A. Toktarbaiuly O. Ibraimov M. Wang H. Nuraje N. Shvets I.V.
18 June 2024American Chemical Society
ACS Omega
2024#9Issue 2426205 - 26212 pp.
In this report, 38 nm-thick amorphous zinc-tin oxide (a-ZTO) films were deposited by radio frequency magnetron cosputtering. a-ZTO films were annealed by in situ monitoring of the sheet resistance improvements during the annealing process. A sharp drop in the slope of the sheet resistance curve was observed. The activation energies for the sheet resistance slope were calculated. The activation energy of the reaction for a sharp drop in the slope is much higher than the activation energy for the rest of the slope. Based on the activation energy values, six annealing temperatures were selected to saturate the highest conductivity at lower annealing temperatures and to identify the effects associated with annealing time. We found a direct correlation between annealing temperatures and the duration of the annealing treatment. a-ZTO films with a high conductivity of 320 S/cm were achieved by annealing at a temperature of 220 °C. It is noteworthy that the annealing temperature of 220 °C has clearly replaced the temperature of 300 °C. An irreversible decrease in resistivity was observed for all films. The conduction mechanism of films before and after annealing was determined. We confirm that all films individually exhibit semiconducting and metallic behaviors in the conduction mechanism before and after the lowest resistivity saturation.
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School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin 2, Ireland
National Nanotechnology Laboratory of Open Type (NNLOT), Al-Farabi Kazakh National University, Al-Farabi Avenue 71, Almaty, 050040, Kazakhstan
Renewable Energy Laboratory National Laboratory Astana (NLA), Nazarbayev University, Kabanbay Batyr 53, Astana, 010000, Kazakhstan
Physics Department School of Sciences and Humanities, Nazarbayev University, Qabanbay Batyr Avenue 53, Astana, 010000, Kazakhstan
Faculty of Physics and Technology, 71 Al-Farabi Avenue, Almaty, 050040, Kazakhstan
State Key Laboratory of Solidification Processing, Center for Nano Energy Materials, School of Materials Science and Engineering, Northwestern Polytechnical University, Shaanxi Joint Laboratory of Graphene (NPU), Xi’an, 710072, China
Department of Chemical & Materials Engineering School of Engineering & Digital Science, Nazarbayev University, Astana, 010000, Kazakhstan
School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN)
National Nanotechnology Laboratory of Open Type (NNLOT)
Renewable Energy Laboratory National Laboratory Astana (NLA)
Physics Department School of Sciences and Humanities
Faculty of Physics and Technology
State Key Laboratory of Solidification Processing
Department of Chemical & Materials Engineering School of Engineering & Digital Science
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