Effect of SILAR cycle on gas sensing properties of In2O3 thin films for CO gas sensor
Horoz B. Tuna Yıldırım S. Soltabayev B. Ateş A. Acar S. Yıldırım M.A.
January 2024Springer
Journal of Materials Science: Materials in Electronics
2024#35Issue 2
In2O3 thin films were deposited via Successive Ionic Layer Adsorption and Reaction (SILAR) method on glass substrates at 20, 30, 40, and 50 SILAR cycles. The effect of SILAR cycle on the general and CO gas sensing properties of the films was investigated. The GIXRD and FE-SEM results indicated that the films had cubic phase and porous morphology. As a function of temperature and gas concentration, CO gas sensing measurements of In2O3 thin film-based sensors were made, and the detection limit and operating temperature values were determined. The optimal operating temperature was found to be 222 °C for all sensors. The CO sensing results demonstrated that the sensor with 30 SILAR cycle had higher sensitivity for 1–100-ppm gas concentration values at 222 °C operating temperature than the others. The sensing responses of the sensors increased from 12 to 29% for 1-ppm CO gas and from 52 to 91% for 100-ppm CO gas at 222 °C, depending on the SILAR cycle. The detection limit of the sensors toward CO gas at 222 °C reached 1 ppm, and the response and recovery times of the sensor with 30 SILAR cycle were found to be 54.2 s and 49 s for 1-ppm CO, and 47.4 and 62.5 s for 100-ppm CO gas at 222 °C, respectively. The activation energy (E a) values of the sensors were found to change between 0.08 and 0.15 eV in the temperature range of 300–340 K and between 0.700 and 0.749 eV in the temperature range of 350–520 K, with SILAR cycle number. Finally, in this study, it was revealed that SILAR cycle number changed the structural, morphological, and CO gas sensing properties of the In2O3 thin films, and SILAR cycle optimization was performed for the highly sensitive In2O3 thin film-based CO gas sensor.
Text of the article Перейти на текст статьи
Department of Electrical and Electronics Engineering, Engineering- Architecture Faculty, Erzincan Binali Yıldırım University, Erzincan, Turkey
Department of Analytical Chemistry, Pharmacy Faculty, Erzincan Binali Yıldırım University, Erzincan, Turkey
National Laboratory Astana, Nazarbayev University, Nur-Sultan, Kazakhstan
Department of Material Engineering, Engineering and Natural Sciences Faculty, Ankara Yıldırım Beyazıt University, Ankara, Turkey
Department of Physics, Science Faculty, Gazi University, Ankara, Turkey
Department of Electrical and Electronics Engineering
Department of Analytical Chemistry
National Laboratory Astana
Department of Material Engineering
Department of Physics
10 лет помогаем публиковать статьи Международный издатель
Книга Публикация научной статьи Волощук 2026 Book Publication of a scientific article 2026